Apparatus are provided for fatigue testing ferroelectric material in a wafer, including an on-chip oscillator to provide a bipolar waveform to a ferroelectric capacitor formed in the wafer, as well as a switching system to selectively provide external access to the ferroelectric capacitor. Test methods are also disclosed provided, including measuring a performance characteristic of a ferroelectric capacitor in the wafer, providing a bipolar waveform to the ferroelectric capacitor for a number of cycles using an on-chip oscillator, and again measuring the performance characteristic after an integer number of cycles of the bipolar waveform.