A system that facilitates optical proximity correction comprises a layout
that is desirably transferred to a silicon wafer, and an optical
proximity correction component that alters the layout based at least in
part upon a distinction between one-dimensional patterns and
two-dimensional patterns within the layout. The system can comprise a
block generator that replaces two-dimensional patterns within the layout
with blocks. A model-based optical proximity correction component
thereafter performs model-based optical proximity correction upon
one-dimensional patterns within the layout.