A method for manufacturing a ferroelectric memory includes: (a) forming
first and second contact sections on a first dielectric layer formed
above a base substrate; (b) forming a laminated body having a lower
electrode, a ferroelectric layer and an upper electrode successively
laminated; (c) forming a conductive hard mask above the laminated body
and etching an area of the laminated body exposed through the hard mask,
to thereby form a ferroelectric capacitor above the first contact
section; (d) forming above the first dielectric layer a second dielectric
layer that covers the hard mask, the ferroelectric capacitor and the
second contact section; (e) forming a contact hole in the second
dielectric layer which exposes the second contact section; (f) providing
a conductive layer in an area including the contact hole for forming a
third contact section; and (g) polishing the conductive layer and the
second dielectric layer until the hard mask above the ferroelectric
capacitor is exposed.