A near-field photomask includes a light shield film having openings to
constitute a light shield portion. The photomask can be used to expose an
exposure target with near-field light generated through the openings. The
openings formed in the light shield film include two or more parallel
rows of first slit openings each having a width smaller than 100 nm, and
two or more parallel rows of second slit openings each having a width
smaller than 100 nm, which extend perpendicularly to the rows of first
slit openings while interlinking at least two of the rows of first slit
openings. A near-field exposure apparatus includes the near-field
photomask with a positioning unit and a source for illuminating polarized
light parallel to the first slit openings for forming a latent-dot-image
on an exposure target only where a second slit opening crosses the light
shield portion on the near-field photomak.