A microelectromechanical microwave vacuum tube device is disclosed. The
device consists of a cathode formed on a substrate, the cathode
comprising electron emitters. A cathode emission control grid is also
attached to the device substrate. The device further includes an output
structure where amplified microwave power is removed from the device. In
the device, the cathode surface and the grid surface are substantially
parallel to each other and substantially perpendicular to the substrate.
One of either the cathode, the grid, or both the cathode and the grid,
are attached to the device substrate by one or more flexural members. The
device further comprises an anode that is substantially parallel to the
cathode surface and the grid surface.