In a manufacturing process of a display device, hydrogenation in an I
layer of photodiodes D1 and D2 is progressed less than that in a channel
portion of a pixel TFT, and a defect density due to dangling bonds not
terminated in the I layer of the photodiodes D1 and D2 is made higher
than a defect density in the channel portion of the pixel TFT. Thus,
while suppressing a leakage current of the pixel TFT, the sensitivity of
the photodiodes D1 and D2 to light is improved. Moreover, a gate
electrode is provided above an i region of a pin-type optical sensor
diode with an insulating film interposed therebetween. Thus, a gate
voltage can control a threshold of a bias voltage when a current starts
to flow into the optical sensor diode and a leakage current is prevented
from flowing into the optical sensor diode.