A fluid system installed on a vehicle and a method for assessing a
property of a fluid flowing in the fluid system. The fluid system and
method entail flowing at least a portion of the fluid through a passage
within a freestanding portion of a micromachined tube supported above a
substrate so as to define a gap therebetween, vibrating the freestanding
portion of the micromachined tube at a resonant frequency thereof,
sensing the movement of the freestanding portion of the micromachined
tube so as to measure at least one of the vibration frequency and
deflection of the freestanding portion relative to the substrate and
produce therefrom at least one output corresponding to at least one of
the mass flow rate, specific gravity, and density of the portion of the
fluid flowing through the passage, and then using the output to compute
the property of the fluid.