Disclosed is a small-sized vibration type gyrosensor device of high
sensitivity provided with a cantilevered oscillator. A cantilevered
oscillator 11, provided with a lower electrode, a piezoelectric film and
an upper electrode, formed on a single-crystal silicon substrate by a
thin film forming process, includes, as an upper electrode, a driving
electrode 6a, formed along the length of the oscillator 11 for applying
the voltage for causing oscillations of the oscillator 11, and first and
second detection electrodes 6b, 6c, formed on both sides of the driving
electrode 6a parallel to the longitudinal direction of the oscillator,
without contacting with the driving electrode 6a. With a width W0 of the
driving electrode 6a, a width W1 of the first detection electrode 6b, a
width W2 of the second detection electrode 6c and with W=W0+W1+W2, the
condition of 0.5<(W0/W)<1 is to be met.