Provided are a method of producing a photoresist comprising a process of
filtrating a raw resist solution containing resist constituent components
and a resist solvent dissolving them, using a filter made of at least one
resin selected from fluorine-based resins and polyolefins, wherein this
filter has been used for filtration of the same or different kind of
other raw resist solution and has been washed with a solvent containing
the resist solvent toward the reverse direction to the filtration
direction, and a method of sequentially producing two or more
photoresists using the same production apparatus, wherein this production
apparatus is washed with the resist solvent, a solvent other than this
resist solvent capable of dissolving or decomposing the resist
constituent components, and the resist solvent, in this order, after
production of the photoresist and before production of the subsequent
photoresist.