A motion control stage assembly includes a payload assembly and a base
assembly joined together with connecting elements. The connecting
elements provide degenerate support between the base and the payload such
that a desired trajectory of the payload with respect to the base is
relatively unconstrained. The connecting element assemblies are
substantially planar, and each includes a first connecting element with a
first intermediate point, a second connecting element with a second
intermediate point, and a secondary connecting element that joins the
first and second connecting elements at the first and second intermediate
points. The first and the second connecting elements may be formed
integrally with each other, of materials including a semiconductor
material, a resilient metal or a plastic, and by processes including
micromachining, wire-electrical-discharge machining, or injection
molding.