This invention is to provide a radiation image sensing apparatus capable
of automatically adjusting an incident radiation dose without requiring
high-speed driving while suppressing any attenuation of the radiation
before detection, and a method of manufacturing the same. To accomplish
this, a read TFT (1) is formed on an insulating substrate (11). The
semiconductor layer (19) and n.sup.+-semiconductor layer (20) of an MIS
photoelectric conversion element (2) are formed on a second insulating
layer (18) that covers the read TFT (1) to be aligned with source and
drain electrodes (16) functioning as lower electrodes. The semiconductor
layer (21) of a TFT sensor (3) is formed to be aligned with a gate
electrode (17) when viewed from the upper side. The semiconductor layers
(19, 21) are formed from the same layer. The upper electrode (22) of the
MIS photoelectric conversion element (2) is formed on the
n.sup.+-semiconductor layer (20). Two ohmic contact layers (23) are
formed on the semiconductor layer (21). Source and drain electrodes (24)
are formed on the two ohmic contact layers (23), respectively.