Methods for forming interconnects in microelectronic workpieces and
microelectronic workpieces having such interconnects are disclosed
herein. One aspect of the invention is directed toward a method for
manufacturing a microelectronic workpiece having a plurality of
microelectronic dies. The individual dies include an integrated circuit
and a terminal electrically coupled to the integrated circuit. In one
embodiment, the method includes forming an opening in the workpiece in
alignment with the terminal. The opening can be a through-hole extending
through the workpiece or a blind hole that extends only partially through
the substrate. The method continues by constructing an electrically
conductive interconnect in the workpiece by depositing a solder material
into at least a portion of the opening and in electrical contact with the
terminal. In embodiments that include forming a blind hole, the workpiece
can be thinned either before or after forming the hole.