A device and method for inspecting an object (2) uses a bright field
illumination beam path (4) of a bright field light source (5), said beam
path being formed so that it passes through the projection optics (3),
and a dark field illumination beam path (6) of a dark field light source
(7), this beam path being formed so that it also passes through the
projection optics (3). The object (2) can be projected by the projection
optics (3) onto the least one detector (8), and the object (2) is
simultaneously illuminated by both light sources (5, 7). In order to
simultaneously detect bright field images and dark field images without
involving complicated filtering operations, the light used for the dark
field illumination is pulsed and the pulse intensity of the light used
for the dark field illumination is greater by at least one order of
magnitude than the intensity of the continuous light, which is used for
the bright field illumination, during a pulsed interval.