A planar positioning system having a rigid base, and first and second
linear actuator means mounted to the rigid base, the first and second
linear actuator means being arranged orthogonal to one another. A rigid
reference surface (2A, 2B) is mounted to the base, (1) and a moveable
platform (17) for holding a workpiece is supported for movement on the
rigid reference surface (2A, 2B). First and second guiding means are
coupled to moveable portions of the respective first and second actuator
means, the first and second guiding means being arranged to bear on the
moveable platform for transmission of forces thereto from the respective
first and second actuator means to effect movement of the platform (17)
on said rigid reference surface (2A, 2B). The first actuator means may
comprise two linear actuators (4A, 4B) parallel to one another and spaced
apart with the second linear actuator means (8) orthogonal thereto and
arranged in an H-shaped configuration. The first and second guiding means
and/or the components of the moveable platform (17) against which they
bear are preferably constructed for low frictional movement in the
direction orthogonal to the transmission of forces therefrom, such as by
the use of non-contact aerostatic bearings (16A, 16B, 16C) or the like.
Similarly, low friction bearings are utilised between the moveable
platform (17) and the reference surface (2A, 2B).