The present invention provides a monolithic inductor developed using radio
frequency micro electromechanical (RF MEMS) techniques. In a particular
embodiment of the present invention, a tunable radio frequency
microelectromechanical inductor includes a coplanar waveguide and at
least one direct current actuatable contact switch positioned to vary the
effective width of a narrow inductive section of the center conductor of
the CPW line upon actuation the DC contact switch.