A cold plate unit includes a coolant system and a fluid system in heat exchange relationship, and a metallic unit. The coolant system has inlet and outlet manifolds and a plurality of coolant lines each including a plurality of loops. The fluid system includes at least one fluid line preferably also including a plurality of loops, and preferably is interleaved with the coolant lines. The metallic unit incorporates the coolant and fluid systems. An apparatus for cooling at least one fluid includes a cold plate and a dispenser unit. The cold plate unit includes a coil basket having a fluid system and a coolant system. The fluid system includes a plurality of fluid lines each comprising a plurality of loops. The coolant system includes coolant inlet and outlet lines, at least one inlet manifold, at least one outlet manifold and a plurality of coolant line segments each comprising a plurality of loops. The cold plate also includes a metallic body selected from the group consisting of aluminum and an aluminum alloy solidified around the coil basket to form the cold plate.

 
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> Chuck for supporting wafers with a fluid

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