A semiconductor polishing composition is provided that can, in at least
one embodiment, efficiently polish a semiconductor device with high
accuracy while preventing fumed silica from being agglomerated and
without causing a polishing flaw in the semiconductor device. Fumed
silica, of which a bulk density of powder before dispersed is 50 g/L or
more and less than 100 g/L, is used as abrasive grains. This makes it
possible to enhance a dispersion state of the fumed silica, and to
realize reduction in transportation cost.