A positive resist composition for immersion exposure which comprises (A) a
resin which enhances its solubility in an alkaline developer by the
action of an acid and (B) at least one compound which generates an acid
upon irradiation with an actinic ray or a radiation, the compound being
selected from the following (Ba) to (Bc): (Ba) a sulfonium salt compound
having a specific alkyl or cycloalkyl residue in the cation part, (Bb) a
sulfonium salt compound having a specific alkyl or cycloalkyl residue in
the cation part, and (Bc) a sulfonium salt compound having a specific
alkyl or cycloalkyl residue in the anion part; and a method of pattern
formation with the composition.