A novel operation regime for capacitive micromachined ultrasonic
transducers (cMUTs). The collapse-snapback operation in which the center
of the membrane makes intermittent contact with the substrate. This
combines two distinct states of the membrane (in-collapse and
out-of-collapse) to unleash unprecedented acoustic output pressures into
the medium. The collapse-snapback operation utilizes a larger range of
membrane defection profiles (both collapsed and released membrane
profiles) and generates higher acoustic output pressures than the
conventional operation. Collapse-snapback operation meets the extreme
acoustic transmit pressure demands of the ultrasonic industry.