Methods and apparatus for measuring an electromagnetic radiation response
property associated with a substrate and calibrating an electromagnetic
measurement device are disclosed. The methods and apparatus generate
electromagnetic waves and capture a portion of the generated waves after
the waves pass through a first polarized filter, reflect from a
substrate, and pass through a second polarized filter arranged in a cross
polar arrangement with respect to the first polarized filter. In
addition, the apparatus captures electromagnetic waves that pass through
an attenuating filter and reflect from one or more calibration standards.
Digital data is determined from the captured electromagnetic waves. The
digital data is used to recalibrate the apparatus.