A NAND memory array has a select line coupled to each of a plurality of
NAND strings of memory cells of the memory array. The select line has a
select gate at each intersection of one of the plurality of NAND strings
and the select line. The select line further includes first and second
conductive layers separated by a dielectric layer, and a contact that
extends from a third conductive layer, disposed on the second conductive
layer, to the first conductive layer. The contact is formed in a hole
that passes through the second conductive layer and the dielectric layer
and that terminates at the first conductive layer. The contact
electrically connects the first and second conductive layers. The hole
can have a slot shape so that the contact spans two or more NAND strings
of the plurality of NAND strings.