A transparent conductive thin film which can be produced easily by
sputtering or the like with a sintered target, needs no post-treatment
such as etching or grinding, is low in resistance and excellent in
surface smoothness, and has a high transmittance in the low-wavelength
region of visible rays; and transparent, electroconductive substrate for
a display panel and an organic electroluminescence device excellent in
light-emitting characteristics, both including the transparent conductive
thin film. More particularly, a transparent conductive thin film
comprising indium oxide as the major component and silicon as a dopant,
having a substantially amorphous structure, wherein silicon is
incorporated at 0.5 to 13% by atom on indium and silicon totaled; and a
transparent conductive thin film comprising indium oxide as the major
component and tungsten and germanium, wherein tungsten is incorporated at
a W/In atomic ratio of 0.003 to 0.047 and germanium is incorporated at a
Ge/In atomic ratio of 0.001 to 0.190.