A system and method for automatically mounting a pellicle assembly on a
photomask are disclosed. The method includes loading a photomask into a
mounting apparatus and loading a pellicle assembly into a back plate of
the mounting apparatus opposite the photomask. The back plate includes at
least one load cell that measures a force applied by the mounting
apparatus to the photomask and the pellicle assembly. The measured force
associated with the at least one load cell is received and the pellicle
assembly is mounted on the photomask to create a photomask assembly if
the measured force is greater than or approximately equal to a minimum
force.