The present invention provides an inspection system of ID chips that can
supply a signal or power supply voltage to an ID chip without contact,
and can increase throughput of an inspection process and an inspection
method using the inspection system. The inspection system according to
the present invention includes a plurality of inspection electrodes, a
plurality of inspection antennas, a position control unit, a unit for
applying voltage to each of the inspection antennas, and a unit for
measuring potentials of the inspection electrodes. One feature of the
inspection system is that a plurality of ID chips and the plurality of
inspection electrodes are overlapped with a certain space therebetween,
and the plurality of ID chips and the plurality of inspection antennas
are overlapped with a certain space therebetween, and the plurality of ID
chips are interposed between the plurality of inspection electrodes and
the plurality of inspection antennas by the position control unit.