The length of the bearing surface in the movable portion which moves
linearly is larger than the length of the bearing surface in the fixed
portion by the stroke of the movement. With this configuration, the
bearing surface on the side of the fixed portion always opposes the
bearing surface on the side of the movable portion. An air supply source
is connected to the fixed portion, and a plurality of air discharge
openings through which air is injected are disposed in the bearing
surface of the fixed portion to constitute an air bearing. Only the side
of the movable portion where the fixed portion is inserted is open. A
coil is disposed on the fixed portion and a magnet is disposed on the
movable portion so that a linear motor is constituted, thus providing a
linear driving device. Cables and the like for supplying compressed air
or power are connected to the fixed portion, not to the movable portion,
thus no external pressure is applied from the cable and the like, and
highly accurate operation is achieved.