The present invention provides an apparatus for forming a chemical
mechanical polishing pad, comprising a tank with polymeric materials, a
storage silo with microspheres and a curative storage tank with curing
agents. The apparatus further provides a premix prep tank for forming a
pre-mixture of the polymeric materials and the microspheres and a
recirculation loop in the premix prep tank for recirculating the
pre-mixture until a desired bulk density is reached. The apparatus
further provides a premix run tank for storing the pre-mixture, a mixer
for forming a mixture of the pre-mixture and the curing agents and a mold
for molding the mixture.