Nonvolatile memory devices and methods of fabricating and driving the same
are disclosed. Disclosed devices and method comprises: growing an oxide
layer on a substrate and depositing a nitride layer on the oxide layer;
patterning the nitride layer; forming injection gates on the lateral
faces of the nitride layer; depositing a first polysilicon, a dielectric
layer and a second polysilicon on the surface of the resulting structure,
sequentially; patterning the second polysilicon, the dielectric layer and
the second polysilicon to form gate electrodes; removing the nitride
layer between the injection gates; forming source and drain extension
regions around each of the gate electrodes by performing an ion
implantation process; forming sidewall spacers on the lateral faces of
the gate electrodes; and forming source and drain regions in the
substrate by performing an ion implantation process with the sidewall
spacers as an ion implantation mask.