Provided are a dual damascene interconnection with a metal-insulator-metal
(MIM) capacitor and a method of fabricating the same. In this structure,
an MIM capacitor is formed on a via-level IMD. After the via-level IMD is
formed, while an alignment key used for patterning the MIM capacitor is
being formed, a via hole is formed to connect a lower electrode of the
MIM capacitor and an interconnection disposed under the via-level IMD.
Also, an upper electrode of the MIM capacitor is directly connected to an
upper metal interconnection during a dual damascene process.