A system for non-contact measurement of thickness of an object. A laser
beam is split into two identical input beams that are directly opposed. A
calibration object of known thickness causes beams to be reflected from
sides of the test object. Each reflected beam passes through auto-focus
means including a quad sensor coupled to focusing means on the input
beam, causing each input beam to be focused on the calibration object,
thereby defining first and second focal points a known distance apart.
The focus is locked and focus error data are generated for each beam. The
calibration object is removed, and the test object is inserted into the
path of the focused input beams, creating focus error signals for the
reflected beams. By determining the deviation of the positions of the
test object reflecting surfaces from the positions of the calibration
object surfaces, the test object thickness can be readily and accurately
determined.