An apparatus comprising an internal combustion engine, an exhaust system in communication with the engine, a particulate sensor associated with the exhaust system, and a controller in electrical communication with the particulate sensor, wherein the controller is configured to determine a change in a rate of exhaust flow in the exhaust system, to compare the change in the rate of exhaust flow to a preselected threshold rate of change; and if the change in the rate of exhaust flow has a preselected relationship to the preselected threshold rate of change, then to determine a degradation of the sensor.

 
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> Method of and apparatus for performing sequential processes requiring different amounts of time in the manufacturing of semiconductor devices

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