A multiple-trench photosensor for use in a CMOS imager having an improved
charge capacity. The multi-trench photosensor may be either a photogate
or photodiode structure. The multi-trench photosensor provides the
photosensitive element with an increased surface area compared to a flat
photosensor occupying a comparable area on a substrate. The multi-trench
photosensor also exhibits a higher charge capacity, improved dynamic
range, and a better signal-to-noise ratio. Also disclosed are processes
for forming the multi-trench photosensor.