End-effectors may be used to grasp microelectronic workpieces for handling
by automated transport devices. One such end-effector includes a
plurality of end-effectors and a detector adapted to detect engagement of
the edge of the workpiece by at least one of the abutments. An
alternative end-effector includes at least three abutments, at least one
of which is resiliently connected to an actuator for movement between a
retracted position and a deployed position wherein it engages a
workpiece.