An electric discharge, narrow band gas laser with improvements in
wavelength stability. Improvements result from reduced laser beam
directional fluctuations or fast correction of those fluctuations.
Applicant has discovered, using an extremely sensitive knife edge optical
technique, that gas discharge laser windows in a trapezoidal
configuration were causing slight wavelength perturbations when laser gas
density varied during laser operation. The optical technique involves
using test laser beam directed through the discharge region of the gas
discharge laser, blocking a portion of the beam with a knife edge and
measuring the non-blocked portion of the beam to monitor beam deflection.
With this technique, Applicant can measure beams deflection with an
accuracy of about 0.3 microradians and with a time response of about 1
microsecond. An improvement in wavelength stability is achieved by
orienting the laser chamber windows parallel to each other at a selected
angle between 40.degree. and 70.degree. with the laser beam direction.
The change eliminates wavelength fluctuations caused by laser beam
direction fluctuation caused pressure fluctuations and the prism effect
resulting from windows mounted in a prior art trapezoidal configuration.
Beam directional fluctuations can also be measured during laser operation
using the knife edge technique or similar fast response techniques such
as a quadrant detector and the measured values can be used in a feedback
arrangement along with fast wavelength control unit to compensate for
changes in beam direction. In addition techniques for reducing the causes
of beam direction fluctuations are disclosed. These include techniques
for minimizing the effects of laser discharge caused pressure waves.