A method for improving manufacturability of a design includes performing
space or enclosure checks on multiple interacting layers of a layout
design and then using the resulting space or enclosure data to move
predetermined feature edges in an altered design database to decrease the
risk of features widths, feature spaces or feature enclosures being
patterned smaller than designed. In some embodiments, the upsized
features are larger in the wafer circuit pattern than are drawn in a
designed database. The method for improving manufacturability of a
design, in some embodiments, is stored on a computer readable storage
medium.