A fully integrated microelectromechanical (MEMS) lxK wavelength selective
switch (WSS) includes an array of N solid-immersion micromirrors (SIMs)
and a K+1 dispersion waveguide arrays that are integrally fabricated
together. In one embodiment, the WSS is fabricated in Silicon. In another
embodiment, the N actuators of the SIMs are etched in the Silicon layer
of a Silicon-on Insulator (SOI) wafer. Thereafter, a Silica layer is
deposited on the Silicon layer and the K+1 waveguide arrays and the
mirrors for the N SIMs are etched in that Silica layer. In yet another
embodiment, the K+1 dispersion waveguide arrays, except for a small
portion of the common confocal coupler, are fabricated using a material
selected from a group including Silica, sol-gel, polymers, that is
deposited on a first wafer selected from a group including Silicon,
Saphire, or other glass insulator material and the remaining portion of
the common confocal coupler and the N SIMs are fabricated in a Silicon
wafer, and the first wafer and Silicon wafer are then butt-coupled
together.