Photoresist compositions that demonstrate superior photolithographic
performance and hardened resist films that show superior resistance to
solvents, have excellent resistance to under plating during the
electrodeposition of metals, and show excellent resist stripping
characteristics. These photoresist compositions according to the
invention are well-suited as for applications in the manufacture of MEMS
and micromachine devices. These photoresist compositions according to the
invention comprise one or more epoxide-substituted, polycarboxylic acid
Resin Component (A), one or more photoacid generator compounds (B), and
one or more solvent (C).