A system and method for collecting and analyzing optical inspection
results obtained during the manufacturing process and comparing those
results to actual functional results of a specially designed test vehicle
integrated circuit. The test vehicle integrated circuit allows failures
to be localized to very small areas, which allows more accurate
correlation between inspection faults and functional failures. The
correlation of inspection faults to actual functional failures is used to
change the sensitivity settings for an optical inspection system to more
accurately detect defects that are likely to be functional failures.