Method for removing tar-forming hydrocarbons from an effluent gas mixtures
from Chemical Vapor Deposition or Chemical Vapor Infiltration processes.
Method includes passing at elevated temperature effluent gas mixture
containing hydrogen, methane, and high molecular weight hydrocarbons
through a bed that contains iron pellets, thereby decomposing tar-forming
high molecular weight hydrocarbons in the effluent gas mixture. Apparatus
including a de-tarring vessel (5) having a packed bed (7, 8, 9) of iron
or iron oxide pellets (1) resting over a perforated distributor plate (2)
and having an exhaust port (12), said de-tarring vessel being operatively
linked via an exhaust port (6) to a CVI or CVD reactor vessel.