A three-degrees of freedom (DOF) MEMS inertial micromachined gyroscope
with nonresonant actuation with a drive direction, sense direction and a
direction perpendicular to the drive and sense directions comprises a
planar substrate, a 2-DOF sense-mode oscillator coupled to the substrate
operated at a flattened wide-bandwidth frequency region, and a 1-DOF
drive mode oscillator coupled operated at resonance in the flattened
wide-bandwidth frequency region to achieve large drive-mode amplitudes.