A method for manufacturing a micro-electromechanical printer nozzle
arrangement on a substrate having a layer of integrated drive circuitry
includes etching a nozzle region through the layer of integrated drive
circuitry up to the substrate. Electrical contact regions are etched
about the nozzle region. Metal and polytetrafluoroethylene (PTFE) layers
are deposited and etched on the layer of integrated drive circuitry so
that the metal layer defines heater elements in electrical contact with
the drive circuitry and embedded in PTFE structures disposed about the
nozzle region. A nozzle chamber is etched in the substrate such that the
nozzle chamber is in fluid communication with the nozzle region. The
substrate is back-etched to define an ink channel in fluid communication
with the nozzle chamber.