A flat panel display device having a high capacitance and a high aperture
ratio. A thin film transistor and a capacitor are formed on an insulating
substrate. The thin film transistor includes a semiconductor layer, a
gate electrode and source and drain electrodes. The capacitor has first
and second capacitor electrodes and a dielectric layer. An insulating
layer is formed over the transistor to insulate the gate electrode from
the source and drain electrodes, and a portion of the insulating layer is
formed as the dielectric layer between the first and second capacitor
electrodes. A non-planar shape of the first capacitor electrode and a
conforming shape of the dielectric layer and a second capacitor electrode
increase a capacitance of the capacitor. The portion of the insulating
layer serving as the capacitor dielectric is formed to be thinner than
the portion of the insulating layer formed over the gate electrode.