A method and apparatus for picking up a semiconductor chip, a method and
apparatus for removing a semiconductor chip from a dicing tape, and a
method of forming a perforated dicing tape are provided. Air may be blown
through air holes in a dicing tape to at least partially separate the
semiconductor chip from the dicing tape and/or create a space between the
semiconductor chip to weaken the adhesion of the dicing tape to the
semiconductor chip. The semiconductor chip may then be picked up by a
removal member and completely removed from the dicing tape. Semiconductor
chips that are not to be removed may be vacuum-suctioned to the dicing
tape. UV radiation or heat may be applied to weaken the adhesion of the
dicing tape. The semiconductor chip may be detected by an optical
detector. Removing the semiconductor chips by air reduces stress and
damage to the semiconductor chips.