The invention discloses a developing apparatus and a developing process.
Wherein the developing process comprises following steps. First, a
developing apparatus and a substrate are provided, wherein the developing
apparatus comprises a conveyer and a nozzle. Then, the substrate is
conveyed along a first direction by the conveyer, and the nozzle is
driven to move along a second direction opposite to the first direction,
wherein the nozzle sprays a developer over the substrate as moving. As
mentioned above, the non-uniformity of development can be reduced.