The invention provides a device to inspect an illumination optical device
and a method to inspect an illumination optical device that make it
possible to efficiently inspect illumination optical devices and to
control manufacturing cost. A lens array inspecting device is provided
with a light source device to emit a parallel luminous flux, lens array
holders to retain lens arrays, which are test objects that split the
parallel luminous flux into a plurality of partial luminous fluxes, and a
ground glass on which the optical images of the luminous fluxes emitted
through the lens arrays are projected. On the ground glass, a parting
frame appropriate to a design illumination region is formed. Therefore,
whether the lens arrays are defective or non-defective can be determined
by checking whether the optical images projected onto the ground glass
include the area of the parting frame.