A system and method of cooling motors of a lithographic tool. The system
includes a temperature-adjusting device which adjusts the temperature of
a heat transfer fluid to a boiling temperature that is substantially
equal to the desired motor housing temperature. The system further
includes a fixed or adjustable pressure device which adjusts the pressure
of the heat transfer fluid to a predetermined level to maintain the
boiling temperature. The boiling temperature remains substantially
constant as the heat generated by the motor is absorbed by the heat
transfer fluid. A pump pumps the heat transfer fluid through the
temperature adjusting device, the pressure device and the motor. The
system functions as a closed-looped system with the addition of a
condenser/heat exchanger.