Disclosed is a method of forming a transistor in an integrated circuit
structure that begins by forming a collector in a substrate and an
intrinsic base above the collector. Then, the invention patterns an
emitter pedestal for the lower portion of the emitter on the substrate
above the intrinsic base. Before actually forming the emitter or
associates spacer, the invention forms an extrinsic base in regions of
the substrate not protected by the emitter pedestal. After this, the
invention removes the emitter pedestal and eventually forms the emitter
where the emitter pedestal was positioned.