A semiconductor integrated circuit device is provided on a semiconductor
substrate, and includes a plurality of word lines, a plurality of data
lines, and a plurality of electrically programmable and erasable
non-volatile memory cells respectively coupled to the plurality of word
lines and to the plurality of data lines. The erasable non-volatile
memory cell each includes a MIS transistor having a floating gate having
a first level polycrystalline silicon layer, a source, and a drain
coupled to the corresponding data line, and a control gate formed of a
semiconductor region in the semiconductor substrate, the control gate
being coupled to the corresponding word line.