The invention provides a fine-adjustment mechanism for a scanning probe
microscopy with high rigidity and high degree of measurement accuracy
wherein a strain gauge displacement sensor which can be installed in a
small space is arranged so that temperature compensation is achieved. The
fine-adjustment mechanism composed of a piezoelectric device is provided
with at least two-piece electrode. One of the electrodes is configured as
a dummy electrode, to which no voltage is applied, and the other
electrode is configured as an active electrode which generates strain
when voltage is applied. One or two resistors are provided on each of the
active electrode and dummy electrode, and a bridge circuit is configured
by the resistors.