A method for forming a hard bias structure in a magnetoresistive sensor is
disclosed. A magnetoresistive sensor having a soft magnetic bias layer,
spacer layer, and a magnetoresistive layer, is formed over a substrate
having a gap layer. A mask is formed over a portion of the
magnetoresistive sensor structure to define a central region. The masked
structure is ion milled to remove portions not shielded by the mask, to
form the central region with sloped sides, and to expose a region of the
gap layer laterally adjacent the sloped sides. A first underlayer is
deposited onto at least the sloped sides at a high deposition angle. A
second underlayer is deposited to at least partially overlap the first
underlayer, and at a first lower deposition angle. A hard bias layer is
deposited over at least a portion of the second underlayer, and at a
second lower deposition angle.