A crosslinked fluorocarbon such as perfluorocarbon, polymeric composition is provided having hydrophilic functional groups, which is crosslinked with fluorinated such as perfluorinated crosslinking groups. Also provided is a branched fluorocarbon such as perfluorocarbon, polymeric composition having hydrophilic functional groups.

 
Web www.patentalert.com

> Photoresists and processes for microlithography

~ 00387